• Advanced fabrication on a micro and nano scale

    ​​​​​​​​​​​​​​​The Nanofabrication Core Lab supports research in the fields of mi​croelectronics, electronic materials, nanotechnology, MEMS, biomedical and optical devices requiring a low-density particle environment. The Nanofabrication Core Lab is equipped with a 2,000 square meter cleanroom consisting of both class 100 and class 1000 areas. It is fully equipped with a wide range of tools at the forefront of nanotechnology, providing a high level of versatility and support for nanofabrication. The Nanofabrication Core Lab also includes a thin film lab, which provides tools to support and enhance the thin film deposition process.​


Capabilities & Facilities

  • The Cleanroom

    The Cleanroom

  • Thin Film

    Thin Film

  • Lithography and Mask Making

    Lithography and Mask Making

  • Etching


  • Deposition and Thermal Diffusion

    Deposition and Thermal Diffusion

  • Metrology and Packaging

    Metrology and Packaging

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