Advanced fabrication on a micro and nano scale
The Nanofabrication Core Lab supports research in the fields of microelectronics, electronic materials, nanotechnology, MEMS, biomedical and optical devices requiring a low-density particle environment. The Nanofabrication Core Lab is equipped with a 2,000 square meter cleanroom consisting of both class 100 and class 1000 areas. It is fully equipped with a wide range of tools at the forefront of nanotechnology, providing a high level of versatility and support for nanofabrication. The Nanofabrication Core Lab also includes a thin film lab, which provides tools to support and enhance the thin film deposition process.
The cleanroom is a controlled environment in which the levels of particulates, microbes and contaminations are minimized by continuously flushing the room with highly filtered air. It occupies 2,000 square meters of class 1000 space with multiple bays at class 100. The environment is tightly controlled at 22°C temperature and 44% relative humidity. It is fully equipped with versatile processing equipment with a full complement of utilities.
The thin film facility is a film-growing laboratory for fundamental and application research of the physical and chemical properties of films and their relevant devices such as optical, catalytic converters, magnetic and ferroelectric and spintronic devices, magnetic sensors and carbon nanotube transistors. The lab hosts a wide range of film fabrication tools and characterization facilities.
The Nanofabrication Core Lab houses advanced exposure tools, employing both optical and electron beam techniques. This allows the potential to pattern features as small as 10nm – 10,000x smaller than the diameter of a human hair. The in-house mask shop has the capability to write and develop masks with a resolution of 700nm. In addition, there are various coaters, developers, hot plates and surface preparation tools for resist processing.
Both dry and wet etching facilities are available for the removal of layers from the surface of a material. The cleanroom is equipped with plasma etching machines that are connected to a variety of reactive gases and can be used to etch more than fifty materials.
The cleanroom houses tools for deposition and thermal diffusion.
The Nanofabrication Core Lab includes facilities for metrology and packaging of semiconductor devices.
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