Facilities and equipment

  • Browse the facilities and equipment in the Nanofabrication Core Lab

    ​The Nanofabrication Core Lab provides equipment for processing and fabrication including thin films deposition and modification, micro and nano-scale patterning, mask writing, wafer dicing, process integration and characterization. The instruments are well-maintained with standard operating procedures which ensure quality performance and interruption-free operation.

Explore the lab

  • ​​Learn more about the Nanofabrication​ Core Lab including latest news, events, and jobs

  • ​​Ex​plore how you can use Nanofabrication Core Lab services​​​

  • ​​Find out​ about the technical expertise offered by staff in the Nanofabrication Core Lab

Facilities and equipment

  • The cleanroom

    The cleanroom

  • Lithography and mask making

    Lithography and mask making

  • Deposition and thermal diffusion

    Deposition and thermal diffusion

  • Etching


  • Metrology and bonding

    Metrology and bonding

  • Thin films

    Thin films

  • Microfluidics


Connect with the Nanofabrication Core Lab